Published 1979 | Version v1
Book

Regrowth of Si and Ge under laser irradiation

  • 1. Rome Univ. (Italy). Ist. di Fisica

Description

The effects of pulsed laser irradiation on amorphous layers of Si and Ge obtained via ion implantation are considered. Amorphous-polycrystalline, amorphous-single crystal and polycrystalline-single crystal transitions have been obtained. Residual disorder and mechanical damage are considered. (author)

Additional details

Publishing Information

Publisher
Institute of Physics.
Imprint Place
Bristol
ISBN
0 85498 137 3
Imprint Title
Defects and radiation effects in semiconductors, 1978
Journal Issue
no. 46
Series
Institute of Physics Conference Series.
Journal Page Range
p. 454-459.

Conference

Title
International conference on defects and radiation effects in semiconductors.
Dates
11 - 14 Sep 1978.
Place
Nice, France.

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
10492582
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
AMORPHOUS STATE; ANNEALING; CRYSTAL GROWTH; CRYSTALLIZATION; GERMANIUM; ION IMPLANTATION; LASER RADIATION; MONOCRYSTALS; PHASE TRANSFORMATIONS; PHYSICAL RADIATION EFFECTS; POLYCRYSTALS; PULSES; SILICON
Descriptors DEC
CRYSTALS; ELECTROMAGNETIC RADIATION; ELEMENTS; HEAT TREATMENTS; METALS; RADIATION EFFECTS; RADIATIONS; SEMIMETALS