Published April 1988 | Version v1
Journal article

Decarbonization by using ECR plasma

  • 1. Institute of Physical and Chemical Research, Wako, Saitama (Japan)

Description

Decarbonization rates were measured by the use of ECR plasmas of H2 or O2. The rates are 2.0 x 1016m-2s-1 for H2 and 2.4 x 1018m-2s-1 for O2 at the same pressure of 1.6 x 10-2 Pa. The rate for O2 is two orders of magnitude higher than that for H2. These results are analyzed depending on the equilibrium theory and the processing of decarbonization can be explained. (author)

Additional details

Publishing Information

Journal Title
Jpn. J. Appl. Phys., Part 1
Journal Volume
27
Journal Issue
4
Series
Jpn. J. Appl. Phys., Part 1.
Journal Page Range
663-665
ISSN
0021-4922
CODEN
JAPND