Published April 1988
| Version v1
Journal article
Decarbonization by using ECR plasma
- 1. Institute of Physical and Chemical Research, Wako, Saitama (Japan)
Description
Decarbonization rates were measured by the use of ECR plasmas of H2 or O2. The rates are 2.0 x 1016m-2s-1 for H2 and 2.4 x 1018m-2s-1 for O2 at the same pressure of 1.6 x 10-2 Pa. The rate for O2 is two orders of magnitude higher than that for H2. These results are analyzed depending on the equilibrium theory and the processing of decarbonization can be explained. (author)
Additional details
Publishing Information
- Journal Title
- Jpn. J. Appl. Phys., Part 1
- Journal Volume
- 27
- Journal Issue
- 4
- Series
- Jpn. J. Appl. Phys., Part 1.
- Journal Page Range
- 663-665
- ISSN
- 0021-4922
- CODEN
- JAPND
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 19090668
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- CARBON; DECARBONIZATION; ECR HEATING; ELECTRON CYCLOTRON-RESONANCE; FIRST WALL; HYDROGEN; IMPURITIES; MAGNETIC CONFINEMENT; OXYGEN; PLASMA; SPUTTERING; SURFACE CLEANING; SURFACE COATING; TOKAMAK DEVICES
- Descriptors DEC
- CLEANING; CLOSED PLASMA DEVICES; CONFINEMENT; CYCLOTRON RESONANCE; DEPOSITION; ELEMENTS; HEATING; HIGH-FREQUENCY HEATING; NONMETALS; PLASMA CONFINEMENT; PLASMA HEATING; RESONANCE; SURFACE FINISHING; THERMONUCLEAR DEVICES; THERMONUCLEAR REACTOR WALLS