Yields of multiply charged ions produced from inner-shell ionization in neutral Ne, Ar and Kr atoms

The ion-charge-state distributions and mean atomic charge ions produced from inner-shell vacancy de-excitation decay have been calculated for neutral Ne, Ar and Kr atoms. The Monte Carlo (MC) technique was employed in simulating cascade development after primary vacancy production. The radiative (X-ray) and non-radiative (Auger and Coster-Kronig) transitions for each vacancy were obtained in the simulation. Consideration of the electron shake-off process and closing of forbidden non-radiative channels improves the results of charge-state distributions and average charge state. The results agree well with the experimental data