Published March 26, 1975
| Version v1
Patent
Open
Improvements in or relating to manufacture of semiconductor devices
Description
no abstract available
Availability note (English)
MF available from INIS under the Report Number.Files
6202551.pdf
Files
(425.6 kB)
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Additional details
Publishing Information
- Imprint Pagination
- 11 p.
- IPC:
- Int. Cl. H01L21/265.
- IPC
- Int. Cl. H01L21/265.
- Patent number
- GB patent document 1388387/B/
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- United Kingdom
- INIS RN
- 6202551
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- DOPED MATERIALS; ELECTRIC CONTACTS; FIELD EFFECT TRANSISTORS; ION IMPLANTATION; PRODUCTION
- Descriptors DEC
- ELECTRICAL EQUIPMENT; SEMICONDUCTOR DEVICES; TRANSISTORS