Published March 22, 2005
| Version v1
Journal article
The effect of RF power on tribological properties of the diamond-like carbon films
- 1. Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon 440-746 (Korea, Republic of)
- 2. School of Information and Communication Engineering, Sungkyunkwan University, Suwon 440-746 (Korea, Republic of)
- 3. School of Information and Communication Engineering, Sungkyunkwan University, Suwon 440-746 (Korea, Republic of) and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon 440-746 (Korea, Republic of)
Description
DLC thin films were prepared by radio frequency (RF) plasma-enhanced chemical vapor deposition (PECVD) method on silicon substrates using methane (CH4), hydrogen (H2) and gas mixture. We have checked the influence of varying RF power on DLC film. The Raman spectroscopy shows the diamond-like carbon (DLC) amorphous structure of the films. AFM images show the surface roughness of the DLC film decrease with increasing RF power. Also, the friction coefficients were investigated by atomic force microscope (AFM) in friction force microscope (FFM) mode
Additional details
Identifiers
- DOI
- 10.1016/j.tsf.2004.07.033;
- PII
- S0040-6090(04)00961-7;
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 475
- Journal Issue
- 1-2
- Journal Page Range
- p. 287-290
- ISSN
- 0040-6090
- CODEN
- THSFAP
Conference
- Title
- 4. Asian-European international conference on plasma surface engineering
- Dates
- 28 Sep - 3 Oct 2003
- Place
- Jeju City (Korea, Republic of)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36112559
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; DIAMONDS; FRICTION; HYDROGEN; METHANE; PLASMA; RADIOWAVE RADIATION; RAMAN SPECTROSCOPY; SILICON; THIN FILMS; TRIBOLOGY
- Descriptors DEC
- ALKANES; CARBON; CHEMICAL COATING; DEPOSITION; ELECTROMAGNETIC RADIATION; ELEMENTS; FILMS; HYDROCARBONS; LASER SPECTROSCOPY; MICROSCOPY; MINERALS; NONMETALS; ORGANIC COMPOUNDS; RADIATIONS; SEMIMETALS; SPECTROSCOPY; SURFACE COATING
Optional Information
- Copyright
- Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.