Published April 1, 2006 | Version v1
Journal article Metadata-only

A novel optical fibers MEMS pressure sensor

Creators

  • 1. Jiangsu Key Lab of Opto-electronic Technology, School of Physical Science and Technology, Nanjing Normal University, 210097, Nanjing (China)

Description

A novel pressure sensor based on the Fabry-Perot interferometry and microelectromechanical system (MEMS) technology is proposed and demonstrated. Light is coupled into the sensor through a fiber. Dual-wavelength demodulation method is used to analyze the reflected optical signals and compensate the errors independent of optical wavelength. Theoretical analysis and simulation results are presented. Experimental results for pressure measurements ranging from 0 Mpa to 3 Mpa demonstrate reasonable linearity and sensitivity

Availability note (English)

Available online at http://stacks.iop.org/1742-6596/34/996/jpconf6_34_165.pdf or at the Web site for the Journal of Physics. Conference Series (Online) (ISSN 1742-6596) http://www.iop.org/

Additional details

Identifiers

URL
http://stacks.iop.org/1742-6596/34/996/jpconf6_34_165.pdf;
DOI
10.1088/1742-6596/34/1/165;

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
34
Journal Issue
1
Journal Page Range
p. 996-1001
ISSN
1742-6596

Conference

Title
International MEMS conference 2006
Acronym
iMEMS2006
Dates
9-12 May 2006
Place
Singapore (Singapore)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
37058636
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ELECTROMECHANICS; ERRORS; INTERFEROMETRY; MICROSTRUCTURE; OPTICAL FIBERS; PRESSURE MEASUREMENT; SENSITIVITY; SIGNALS; SIMULATION; VISIBLE RADIATION; WAVELENGTHS
Descriptors DEC
ELECTROMAGNETIC RADIATION; FIBERS; MECHANICS; RADIATIONS