Investigation into the structure of molybdenum vacuum condensate on supphire

The results are presented of an integrated X-ray-diffractometric and electronographic investigation into the effect of the substrate temperature, film thickness, and rate of condensation on the structure of molybdenum films condensed onto the surface of sapphire oriented with the plane (30.0). The molybdenum films have been obtained in a vacuum of (2-3)x10-6 mm Hg by electron-beam heating of the initial material. It is noted that the substrate temperature in the course of condensation, and the film thickness exert the principal effect on the structure of Mo films. Sufficiently perfect epitaxial films of Mo of thickness d(>=)1 μ with orientation (211)long (30.0) α-Al2O3 may be obtained in the substrate temperature range of 1173-1223 K