Dissociative ionisation and neutral dissociation: CF4 a case study
Description
New results for the total neutral dissociation cross section and an estimate of the gross cross section for the production of neutral fluorine by electron impact on CF4 have been obtained by combining previously reported results for the total dissociation cross section and the counting cross section for the total dissociative ionisation. This advancement was made possible by recently reported results for multication formation obtained from coincidence experiments. The estimate of the neutral fluorine production cross section is of the same order of magnitude as the total dissociation cross section itself, a similarity which may explain why CF4 is such an effective etching gas. The available cross section data for electron impact energies between 5 and 200 eV are reviewed. 28 refs., 4 tabs
Additional details
Publishing Information
- Journal Title
- Australian Journal of Physics
- Journal Volume
- 45
- Journal Issue
- 3
- Journal Page Range
- p. 317-324.
- ISSN
- 0004-9506
- CODEN
- AUJPAS
Conference
- Title
- Joint symposium on electron and ion swarms and low energy electron scattering.
- Dates
- 18-20 Jul 1991.
- Place
- Gold Coast, QLD (Australia).
INIS
- Country of Publication
- Australia
- Country of Input or Organization
- Australia
- INIS RN
- 24037002
- Subject category
- S74: ATOMIC AND MOLECULAR PHYSICS;
- Resource subtype / Literary indicator
- Conference, Numerical Data
- Descriptors DEI
- CARBON FLUORIDES; COINCIDENCE METHODS; DISSOCIATION; ELECTRON SPECTRA; ELECTRON-MOLECULE COLLISIONS; EV RANGE 10-100; EXPERIMENTAL DATA; FLUORESCENCE; IONIZATION; PLASMA PRODUCTION; TOTAL CROSS SECTIONS
- Descriptors DEC
- CARBON COMPOUNDS; COLLISIONS; COUNTING TECHNIQUES; CROSS SECTIONS; DATA; ELECTRON COLLISIONS; EMISSION; ENERGY RANGE; EV RANGE; FLUORIDES; FLUORINE COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; INFORMATION; LUMINESCENCE; MOLECULE COLLISIONS; NUMERICAL DATA; PHOTON EMISSION; SPECTRA