Studies of particle emission from solid surfaces by means of direct-Reading Detectors

An experimental set-up measuring differential sputtering yields and angular distribution of sputtered and/or evaporated particles is described. By beam switching the evaporation and sputtering components can be separated which is a problem at higher sample temperatures. As a specific application the temperature dependence of the differential sputtering yield of silver under atomic and molecular antimony bombardment is investigated. It is concluded that direct reading particle detectors can give valuable information in special areas. (G.Q.)