Published August 2004 | Version v1
Journal article

Fabrication of conjugated polymers nanostructures via direct near-field optical lithography

Description

We report our investigations into the fabrication of nanostructures of poly(p-phenylene vinylene) via direct scanning near-field lithography of its soluble precursor. Our technique is based on the spatially selective inhibition of the precursor solubility by exposure to the ultraviolet optical field present at the apex of commercially available, Au-coated near-field probes with aperture diameters between 40 and 80 nm (±5 nm). After development in methanol and thermal conversion under vacuum we obtain features with a minimum dimension of 160 nm. We analyse our results via tapping-mode atomic force microscopy, and find a clear phase contrast between the core and the centre of the lithographed features, corroborating the hypothesis that hard, fully insolubilised regions are surrounded by a gel-like phase, which we estimate of the order of 110-130 nm for the smallest features, by comparing our experiments with simulations carried out using a Bethe-Bouwkamp model. Use of such model also allows us to discuss the influence of probe size, tip-sample distance, and film thickness on the resolution of the lithographic process. We demonstrate the use of the technique for the direct writing of two-dimensional periodic structures with intentional defects and a periodicity relevant to applications in the visible range

Additional details

Identifiers

DOI
10.1016/j.ultramic.2003.12.016;
PII
S0304399104000580;

Publishing Information

Journal Title
Ultramicroscopy (Amsterdam)
Journal Volume
100
Journal Issue
3-4
Journal Page Range
p. 449-455
ISSN
0304-3991
CODEN
ULTRD6

Conference

Title
5. international conference on scanning probe microscopy, sensors and nanostructures
Dates
23-26 May 2003
Place
Oxfordshire (United Kingdom)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
37036529
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
APERTURES; ATOMIC FORCE MICROSCOPY; FABRICATION; GELS; METHANOL; NANOSTRUCTURES; POLYMERS; PRECURSOR; PROBES; SOLUBILITY; THICKNESS; THIN FILMS; ULTRAVIOLET RADIATION
Descriptors DEC
ALCOHOLS; COLLOIDS; DIMENSIONS; DISPERSIONS; ELECTROMAGNETIC RADIATION; FILMS; HYDROXY COMPOUNDS; MICROSCOPY; OPENINGS; ORGANIC COMPOUNDS; RADIATIONS

Optional Information

Copyright
Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.