A simple retardation system for low-energy implantation of mass-separated radioactive ions

A simple retardation system has been constructed in order to realize low-energy ion-implantations using an electromagnetic isotope separator (EMIS). Mass-separated ions are decelerated through a smoothly increasing potential which is produced in a box which is coated inside with a highly resistive film. To test the performance of the system, 133Xe ions retarded from 20 keV by a maximum of 15 keV were implanted into a nickel foil covered by a thin copper layer, and their mean range in copper was determined with a radiochemical technique. The observed ranges are in good agreement with theoretical prediction, which manifests that the system works well as expected. (orig.)