Realizing increased sub-pixel spatial resolution in x-ray imaging using displaced multiple images

A method generally called over sampling, to reach sub-pixel resolution by taking slightly displaced images of an object is investigated for x-ray applications. By mounting the sensor on a high precision step motor table it is possible to increase the spatial resolution from 55 μm to at least 20μm x 20 μm, which is required for quality assurance measurement in several industry processes. The performance compared to physically smaller pixels is shown., and the effects of charge sharing on the method are investigated. The suggested method is relatively cost effective compared to using x-ray microscopy. (Author)