Published 1999
| Version v1
Journal article
Feature of carbon coating deposition in beam-plasma
- 1. Kharkov State University, 310108 Kharkov (Ukraine)
- 2. Institute of Plasma Physics, National Scientific Center 'Kharkov Institute of Physics and Technology', Kharkov (Ukraine)
Description
In this paper the modes of the diamond-like carbon film deposition in beam-plasma systems are studied
Additional details
Publishing Information
- Journal Title
- Problems of Atomic Science and Technology. Series: Plasma Physics
- Journal Volume
- 3,4
- Journal Issue
- 3,4
- Journal Page Range
- p. 267-269
- ISSN
- 1682-9344
Conference
- Title
- 6. Ukrainian Conference on Plasma Physics and Controlled Fusion
- Dates
- 14-20 Sep 1998
- Place
- Alushta (Ukraine)
INIS
- Country of Publication
- Ukraine
- Country of Input or Organization
- Ukraine
- INIS RN
- 33013193
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BEAM-PLASMA SYSTEMS; CARBON; DEPOSITION; ELECTRIC DISCHARGES; ELECTRON BEAMS; SECONDARY EMISSION; SURFACE COATING
- Descriptors DEC
- BEAMS; DEPOSITION; ELEMENTS; EMISSION; LEPTON BEAMS; NONMETALS; PARTICLE BEAMS