Forced response of electrostatic harmonic drive to torque fluctuation

In this paper, the radial and tangential electric field forces are given. Based on the electromechanical coupled dynamic equations of the drive system, by generalized force and generalized coordinate, the forced response of the drive system to torque fluctuation are investigated. Changes of the forced response along with the system parameters are given as well. The micro flexible ring radius and clearance between the micro ring and stator, etc. have obvious influences on the forced responses of the drive system. These results are useful in design and manufacture of the micro drive system and can offer some reference for other micro electromechanical systems