Published June 1, 2019 | Version v1
Journal article

Post-breakdown field emission behavior of a planar-structured single SWNT bundle in air

  • 1. Institute of Microelectronics, Peking University, 100871, Beijing (China)

Description

In this paper, we report the field emission (FE) behavior in air of a single-walled carbon nanotube (SWCNT) bundle after breakdown. Our samples have the planar structure on the SiO2/Si substrate of one breaking-tip of a single SWCNT bundle horizontally pointing to the sidewall of an electrode with a nano-sized gap, which were prepared using microfabrication techniques, AC dielectrophoresis (DEP) and current-induced breakdown in sequence. The current–voltage relationship was monitored under 0–100 V scanning DC voltage. The results show that the planar-structured SWCNT bundle in air presents a significantly different FE performance from the conventional vertical structured carbon nanotube (CNTs) FE devices in vacuum. Similarly, the former FE current also exhibits several interval phenomena instead of monotonically exponentially rising (Di Bartolomeo et al 2007 Carbon 45 2957–71), while the structural damage of CNT tips result from oxidation instead of defects largening as for the latter. This research is conducive to further knowledge of possible electrical behavior after CNT breakdown for the failure effect during the fabrication and operation of CNT-based electronic/sensing devices and systems. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1361-6439/ab0f53

Additional details

Identifiers

Publishing Information

Journal Title
Journal of Micromechanics and Microengineering (Print)
Journal Volume
29
Journal Issue
6
Journal Page Range
[8 p.]
ISSN
0960-1317
CODEN
JMMIEZ

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
51065569
Subject category
S42: ENGINEERING;
Descriptors DEI
CARBON NANOTUBES; DAMAGE; ELECTRIC POTENTIAL; ELECTRODES; EQUIPMENT; FABRICATION; FAILURES; FIELD EMISSION; MONITORS; OXIDATION; PERFORMANCE; SILICON OXIDES; SUBSTRATES
Descriptors DEC
CARBON; CHALCOGENIDES; CHEMICAL REACTIONS; ELEMENTS; EMISSION; MEASURING INSTRUMENTS; NANOSTRUCTURES; NANOTUBES; NONMETALS; OXIDES; OXYGEN COMPOUNDS; SILICON COMPOUNDS