Test and Analysis of Tube Component of Electron Beam Machine (EBM) 350 keV/10 m A

Tube component is the one of the local component that is designed and constructed using local materials in the Center of Advanced Technology Research and Development, and used mainly for vacuum chamber of EBM vacuum system. Gas load, product gases from out gassing process, permeation, evaporation and leakage, are factors that can affect the vacuum level of the vacuum chamber. By baking out the vacuum chamber, the releasing process from inside and wall surface will be faster, so that the out gassing and permeation rate will increase. By applying baked out process the tube having better vacuum performance were obtained. From the calculation results for the vacuum level chamber having volume of 9,859 liter and surface area of 4004,45 cm2, without baking out the out gassing rate (QD) was 4,644 x 10-6 Torr liter/sec., permeation (QP) was 4,923 x 10-6 Torr liter/sec., leakage (QL) was 1,691 x 10-9 Torr liter/sec, gas load (QG) was 9,568 x 10-6 Torr liter/sec. By baking out at 104,3 oC we obtained (QD) 2,276 x 10-5 Torr liter/sec, (QP) 1,831 x 10-5 Torr liter/sec, (QL) 3,161 x 10-9 Torr liter/sec, and (QG) 4,108 x 10-5 Torr liter/sec. The experimental results indicated that the final vacuum level which can be obtained the tube component without baking out was 3.375 x 10-6 Torr in 5.33 hours, and with baking out at 104,3 oC the vacuum level was 2,25 x 10-6 Torr in 4,25 hours. Whereas the experimental results of vacuum components in EBM system to be obtained the vacuum were 3,1 x 10-6 mbar (2,33.10-6 Torr). Those result indicated that the tube components fulfill the requirement to be used for the vacuum chamber component in the vacuum system of EBM. (author)