Published December 2018 | Version v1
Journal article

Effects of source/drain-electrode material, thickness and fabrication method on the electrical performance of pentacene thin-film transistor

  • 1. Department of Electrical and Electronic Engineering, The University of Hong Kong, Pokfulam Road (Hong Kong)
  • 2. School of Microelectronics, Xi'an Jiao Tong University, Xi'an 710049 (China)
  • 3. Department of Applied Physics, The Hong Kong Polytechnic University, Hung Hom (Hong Kong)

Description

Hightlights• Effect of source/drain (S/D) electrode material is investigated. • Impact of S/D electrode preparation method is studied. • Influence of S/D electrode thickness is discussed. The effects of source/drain (S/D) electrode material (Ni, Pt and Pd) and deposition method (electron-beam evaporation and sputtering) on the performance of pentacene organic thin-film transistor (OTFT) are studied. Experimental results show that the OTFT with Pd S/D electrodes deposited by sputtering exhibits the best electrical performance. This should be due to the small charge-injection barrier at the pentacene/electrode interface and small thermal load generated during the metal deposition. Besides, through varying the Pd S/D electrode thickness, it is found that increasing the electrode thickness results in performance degradation due to degraded pentacene/electrode interface, which is caused by higher thermal stress developed during longer deposition time.

Availability note (English)

Available from http://dx.doi.org/10.1016/j.tsf.2018.10.004

Additional details

Identifiers

DOI
10.1016/j.tsf.2018.10.004;
PII
S0040609018306679;

Publishing Information

Journal Title
Thin Solid Films
Journal Volume
667
Journal Page Range
p. 28-33
ISSN
0040-6090
CODEN
THSFAP

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
50038216
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
DEPOSITION; ELECTRODES; ELECTRON BEAMS; EVAPORATION; SPUTTERING; THERMAL STRESSES; THICKNESS; THIN FILMS; TRANSISTORS
Descriptors DEC
BEAMS; DIMENSIONS; FILMS; LEPTON BEAMS; PARTICLE BEAMS; PHASE TRANSFORMATIONS; SEMICONDUCTOR DEVICES; STRESSES

Optional Information

Copyright
Copyright (c) 2017 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.