Effects of source/drain-electrode material, thickness and fabrication method on the electrical performance of pentacene thin-film transistor
Creators
- 1. Department of Electrical and Electronic Engineering, The University of Hong Kong, Pokfulam Road (Hong Kong)
- 2. School of Microelectronics, Xi'an Jiao Tong University, Xi'an 710049 (China)
- 3. Department of Applied Physics, The Hong Kong Polytechnic University, Hung Hom (Hong Kong)
Description
Hightlights• Effect of source/drain (S/D) electrode material is investigated. • Impact of S/D electrode preparation method is studied. • Influence of S/D electrode thickness is discussed. The effects of source/drain (S/D) electrode material (Ni, Pt and Pd) and deposition method (electron-beam evaporation and sputtering) on the performance of pentacene organic thin-film transistor (OTFT) are studied. Experimental results show that the OTFT with Pd S/D electrodes deposited by sputtering exhibits the best electrical performance. This should be due to the small charge-injection barrier at the pentacene/electrode interface and small thermal load generated during the metal deposition. Besides, through varying the Pd S/D electrode thickness, it is found that increasing the electrode thickness results in performance degradation due to degraded pentacene/electrode interface, which is caused by higher thermal stress developed during longer deposition time.
Availability note (English)
Available from http://dx.doi.org/10.1016/j.tsf.2018.10.004Additional details
Identifiers
- DOI
- 10.1016/j.tsf.2018.10.004;
- PII
- S0040609018306679;
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 667
- Journal Page Range
- p. 28-33
- ISSN
- 0040-6090
- CODEN
- THSFAP
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 50038216
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- DEPOSITION; ELECTRODES; ELECTRON BEAMS; EVAPORATION; SPUTTERING; THERMAL STRESSES; THICKNESS; THIN FILMS; TRANSISTORS
- Descriptors DEC
- BEAMS; DIMENSIONS; FILMS; LEPTON BEAMS; PARTICLE BEAMS; PHASE TRANSFORMATIONS; SEMICONDUCTOR DEVICES; STRESSES
Optional Information
- Copyright
- Copyright (c) 2017 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.