Published September 22, 1976 | Version v1
Patent Metadata-only

Instrument for measuring the current of charged particle beams

Creators

Description

This invention relates to an instrument for measuring the current of charged particle beams, particularly ion and electron beams, accurate determinations of the current of ion and electron beams being necessary in ion implantation systems and electron beam bombardment systems, where the implanted dose or the importance of the electron bombardment is directly linked to the beam current

Availability note (English)

Available from Institut National de la Propriete Industrielle, Paris (France).

Abstract (French)

La presente invention porte sur un appareil permettant de mesurer le courant des faisceaux de particules chargees, en particulier des faisceaux d'ions et d'electrons, les mesures precises du courant des faisceaux ioniques et des faisceaux electroniques etant necessaires dans les systemes d'implantation ionique et dans les systemes de bombardement par faisceaux electroniques, dans la mesure ou la dose implantee ou l'importance du bombardement d'electrons est liee directement au courant du faisceau

Additional details

Additional titles

Original title (French)
Appareil de mesure du courant des faisceaux de particules chargees

Publishing Information

Imprint Pagination
10 p.
IPC:
Int. Cl. G01t1/29; G21k5/00.
IPC
Int. Cl. G01t1/29; G21k5/00.
Patent number
FR patent document 2331039/A/

INIS

Country of Publication
France
Country of Input or Organization
France
INIS RN
10433459
Subject category
S43: PARTICLE ACCELERATORS;
Resource subtype / Literary indicator
Non-conventional Literature
Descriptors DEI
BEAM CURRENTS; ELECTRIC MEASURING INSTRUMENTS; ELECTRON BEAMS; FARADAY CUPS; ION BEAMS
Descriptors DEC
BEAM MONITORS; BEAMS; CURRENTS; ELECTRICAL EQUIPMENT; LEPTON BEAMS; MEASURING INSTRUMENTS; PARTICLE BEAMS

Optional Information

Notes
Priority claim: 5 Nov 1975, US.