Published September 1988
| Version v1
Journal article
Physical process in UHV
Creators
- 1. Bhabha Atomic Research Centre, Bombay (India). Technical Physics and Prototype Engineering Div.
Description
This paper reviews fundamental physical processes relevant to UHV environment. These processes can be categorised into three groups of interactions: collision processes in gases, molecule-surface interactions and interaction of charged particles and radiations with surfaces. All three processes influence the production, measurement and cleanliness of UHV. (author). 26 refs
Additional details
Publishing Information
- Journal Title
- Bulletin of the Indian Vacuum Society
- Journal Volume
- 19
- Journal Issue
- 3
- Series
- Bull. Indian Vac. Soc.
- Journal Page Range
- 17-26
- ISSN
- 0970-2334
- CODEN
- BIVSE
INIS
- Country of Publication
- India
- Country of Input or Organization
- India
- INIS RN
- 21088508
- Subject category
- S74: ATOMIC AND MOLECULAR PHYSICS;
- Descriptors DEI
- BACKSCATTERING; DESORPTION; ELECTRON COLLISIONS; EMISSION; GASES; MOLECULE COLLISIONS; REVIEWS; SPUTTERING; SURFACES; ULTRAHIGH VACUUM
- Descriptors DEC
- COLLISIONS; DOCUMENT TYPES; FLUIDS; SCATTERING