Published August 1, 1983 | Version v1
Journal article

A PIXE-RBS method for measuring partial sputtering yields of stainless steel

  • 1. Kyoto Univ. (Japan). Faculty of Engineering

Description

A collector method has been developed for measuring the partial sputtering yields of stainless steel constituents. The sticking probabilities of Cr-, Fe-, and Ni-atoms to a carbon collector are found to be close to unity. By combining a PIXE with an RBS analysis, each quantity of the constituent atoms deposited on the collector surface is micro-quantitatively measured with a good accuracy. When an SS304 plate is exposed to 25 keV He+ ions in a vacuum of 10-6 Torr range, no evident preferential sputtering is found among three constituent elements at a fluence of 4.9 x 1019 He/cm2. (orig.)

Additional details

Publishing Information

Journal Title
Nucl. Instrum. Methods Phys. Res.
Journal Volume
213
Journal Issue
2/3
Series
Nucl. Instrum. Methods Phys. Res.
Journal Page Range
469-475
ISSN
0029-554X