Published January 2004 | Version v1
Journal article

Medium synchrotron radiation facility, NewSUBARU and its industrial applications

  • 1. Himeji Institute of Technology, Graduate School of Engineering, Himeji (Japan)

Description

Medium scale synchrotron radiation facility, NewSUBARU (1.5 GeV), whose energy levels are much less than SPring-8 (8 GeV), is introduced including storage ring (circumference is 119 m) and several beamlines. Synchrotron radiation light between soft X-ray and ultraviolet light is NewSUBARU's favorite one. Examples for industry applications performed by beamlines of NewSUBARU, lithography, new materials production and so on, are also shown. (author)

Additional details

Publishing Information

Journal Title
Zairyo To Kankyo
Journal Volume
53
Journal Issue
1
Journal Page Range
p. 7-12
ISSN
0917-0480

Optional Information

Notes
11 refs., 12 figs., 5 tabs.