Published September 1976 | Version v1
Journal article

Formation of dislocation networks on annealing of boron-implanted silicon layers

  • 1. AN SSSR, Novosibirsk. Inst. Fiziki Poluprovodnikov

Description

no abstract available

Additional details

Additional titles

Original title (Russian)
Obrazovanie dislokatsionnykh setok pri otzhige implantirovannykh borom sloev kremniya

Publishing Information

Journal Title
Fiz. Tverd. Tela
Journal Volume
18
Journal Issue
9
Series
Fiz. Tverd. Tela.
Journal Page Range
2803-2805

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
8344823
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract
Descriptors DEI
ANNEALING; BORON IONS; BURGERS VECTOR; DISLOCATIONS; ION IMPLANTATION; KEV RANGE 10-100; LAYERS; RADIATION DOSES; SILICON
Descriptors DEC
ATOMIC IONS; CHARGED PARTICLES; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; ELEMENTS; ENERGY RANGE; HEAT TREATMENTS; IONS; KEV RANGE; LINE DEFECTS; SEMIMETALS

Optional Information

Notes
Published in summary form only; for English translation see the journal Sov. Phys. - Solid State.