Ion-induced Auger electrons contrast on cross-beam systems

The article deals with the basic aspects of ion-stimulated Auger process. The authors suggested using the standard Everhart–Thornley detector to obtain a contrast of ion-induced Auger electrons on cross-beam systems using mathematical processing of the image which is based on spectroscopic information. As a result, this work consisted of obtaining images that showed the contrast distribution of Auger electrons and the sputtering yield on aluminum thin films samples. (paper)