Equilibrium atomic structure of a monocrystal surface under ion bombardment

The atomic structure of a monocrystal surface under ion bombardment depending on irradiation doze is investigated by computer modelling. As a result of calculation it has been shown that at certain irradiation doze, which depends, in particular, on a slipping angle, vacancy concentration in near-to-surface layers reaches saturation. With further increase of irradiation doses only the shift of dynamically-equilibrium structure takes place due to sputtering