Published October 21, 2005 | Version v1
Journal article

Annealing Studies of magnetic Czochralski silicon radiation detectors

  • 1. Instituto de Microelectronica de Barcelona (CSIC) 08193 (Spain)

Description

Silicon wafers grown by the Magnetic Czochralski (MCZ) method have been processed in form of pad diodes at Instituto de Microelectronica de Barcelona (IMB-CNM) facilities. The n-type MCZ wafers were manufactured by Okmetic and they have a nominal resistivity of 1 kΩ cm. Diodes were characterized by reverse current and capacitance measurements before and after irradiations. The MCZ diodes were irradiated in a 24 GeV proton beam at CERN PS facilities and their annealing behavior with time was compared to that shown by oxygenated FZ diodes processed in the same way. FZ and MCZ diodes were irradiated up to fluences of 1016 p/cm2 which corresponds to the maximum fluence foreseen in the inner part of the future ATLAS upgrade in view of a Super-LHC with an increase in the luminosity

Additional details

Identifiers

DOI
10.1016/j.nima.2005.06.002;
PII
S0168-9002(05)01166-6;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment
Journal Volume
552
Journal Issue
1-2
Journal Page Range
p. 27-33
ISSN
0168-9002
CODEN
NIMAER

Conference

Title
5. international conference on radiation effects on semiconductor materials, detectors and devices
Dates
10-13 Oct 2004
Place
Florence (Italy)

Optional Information

Copyright
Copyright (c) 2005 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.