Structure and morphology of Sn_1-xAl_xO₂ thin films prepared by spray pyrolysis technique

Al-doped tin oxide [Sn_1-x Al_xO₂(x=0, 0.03 and 0.09)] thin films were prepared by spray pyrolysis technique (SPT) on glass substrate. XRD and AFM techniques have been used for the investigation of structural and morphological properties of the films. XRD spectra reveal the polycrystalline nature of the films having tetragonal structure. AFM images show an evolution in the morphology in the sense that larger grains of SnO₂ are converted in some smaller grains upon Al inclusion. This may be due to the strain developed due to the Al substitution. The roughness has been found to decrease with the increase in Al concentration. (paper)