Analytical characteristics of wavelength dispersive XRF imaging with straight polycapillary and 2D detector

XRF imaging is analytical method to obtain 2D elemental distribution by using XRF. One of the typical methods of XRF imaging is scanning XRF imaging using micro X-ray beam. For this method, energy dispersive detector is used. However, in energy dispersive scanning XRF imaging, since the sample is scanned with a fixed micro X-ray beam, this method needs long measurement time to obtain elemental images of a wide area. The alternative method for performing XRF imaging in a shorter time is a projection XRF imaging. For this method, incident X-ray is irradiated to a sample in a wide area and fluorescence X-ray is detected by 2D detector. However, since 2D detector has no energy resolution, there is a problem that the identification of the elements can not be performed. Therefore, we proposed the projection XRF imaging combined with wavelength dispersive spectroscopy (WDS). In this paper, we discuss WD-XRF imaging using straight polycapillary and X-ray CCD camera. (author)