Published March 1990
| Version v1
Journal article
Oxidation of TiN and Ti films
- 1. Tokyo Univ. (Japan). Faculty of Engineering
Description
Published in summary form only
Additional details
Publishing Information
- Journal Title
- Shinku
- Journal Volume
- 33
- Journal Issue
- 3
- Series
- Shinku.
- Journal Page Range
- 340-342
- ISSN
- 0559-8516
- CODEN
- SHINA
Conference
- Title
- 30. vacuum symposium.
- Dates
- 24-26 Oct 1989.
- Place
- Tokyo (Japan).
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 22009575
- Subject category
- S43: PARTICLE ACCELERATORS;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- COATINGS; HIGH-FREQUENCY DISCHARGES; MICROWAVE EQUIPMENT; OXIDATION; THIN FILMS; TITANIUM; TITANIUM NITRIDES; WINDOWS
- Descriptors DEC
- CHEMICAL REACTIONS; ELECTRIC DISCHARGES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; METALS; NITRIDES; NITROGEN COMPOUNDS; OPENINGS; PNICTIDES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS