Plasma chemical synthesis of diamond-like phases of boron nitride

The results of research of plasma chemical synthesis of BN-coatings are given; these coatings contain the diamond-like phase of the cubic boron nitride. The process of precipitation had four phases: (i) gas-activator excitation in the discharge SHF-chamber; (ii) transport generated by plasma active substances from the excitation area into the reactor; (iii) mixing of activated substances with borazine (B3N3H6) injected lower in the flow; (iv) precipitation of thin films on the heated surface of the glow discharge area. (author)