Published 1989 | Version v1
Report Open

High efficiency turbomolecular pumps

Creators

Description

Highly efficient turbomolecular TMNG-10000 and TMNG-20000 pumps with the calculated 10 and 20 m3/s fast operation are developed. Using an experimental sample of the TMNG-10000 pump its operating characteristics are determined. The maximum residual pressure is 4x10-8Pa. The pump fast operation by nitrogen is 9.8 m3/s by helium and hydrogen - 11.5 m3/s. The maximum compression degree values are for nitrogen - 1.4x109, for helium - 8x104, for hydrogen - 6x103. The pump is resistive to atmospheric pressure break through. 5 refs

Availability note (English)

MF available from INIS under the Report Number.

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23002849.pdf

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Additional details

Additional titles

Original title (Russian)
Высокопроизводительные турбомолекулярные насосы

Publishing Information

Imprint Pagination
8 p.
Report number
NIIEFA-P-A--0829

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
23002849
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; S43: PARTICLE ACCELERATORS;
Descriptors DEI
HELIUM; HIGH VACUUM; HYDROGEN; MEDIUM VACUUM; NITROGEN; PERFORMANCE TESTING; PRESSURE DEPENDENCE; SPECIFICATIONS; STABILITY; TIME DEPENDENCE; TURBOMOLECULAR PUMPS; ULTRAHIGH VACUUM
Descriptors DEC
ELEMENTS; EQUIPMENT; NONMETALS; PUMPS; RARE GASES; TESTING; VACUUM PUMPS