Published 2000
| Version v1
Miscellaneous
Investigation of ion implantation into modified silicon surface for fabrication of p-n junctions for photovoltaic devices
Creators
- 1. Institute of Electron Technology, Warsaw (Poland)
- 2. Institute of Electronic Materials Technology, Warsaw (Poland)
Description
no abstract available
Additional details
Publishing Information
- Imprint Title
- Abstracts of 3. International Symposium Ion Implantation and Other Applications of Ions and Electrons, ION 2000
- Imprint Pagination
- 120 p.
- Journal Page Range
- p. 102
Conference
- Title
- 3. International Symposium Ion Implantation and Other Applications of Ions and Electrons, ION 2000
- Dates
- 12-15 Jun 2000
- Place
- Kazimierz Dolny (Poland)
INIS
- Country of Publication
- Poland
- Country of Input or Organization
- Poland
- INIS RN
- 32030053
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract, Conference, Non-conventional Literature
- Descriptors DEI
- AMORPHOUS STATE; ANNEALING; ETCHING; FLUORINE IONS; GERMANIUM IONS; ION IMPLANTATION; MICROELECTRONICS; P-N JUNCTIONS; PHOTOVOLTAIC CELLS; PLASMA; POROUS MATERIALS; SILICON
- Descriptors DEC
- CHARGED PARTICLES; DIRECT ENERGY CONVERTERS; ELEMENTS; HEAT TREATMENTS; IONS; MATERIALS; PHOTOELECTRIC CELLS; SEMICONDUCTOR JUNCTIONS; SEMIMETALS; SURFACE FINISHING