Published May 10, 2010 | Version v1
Journal article Metadata-only

p-type conduction in sputtered indium oxide films

Creators

  • 1. Instituto de Ciencia de Materiales de Aragon and Departamento de Fisica de la Materia Condensada, CSIC-Universidad de Zaragoza, 50009 Zaragoza (Spain)
  • 2. Departamento de Fisica Aplicada, Universidad de Zaragoza, 50009 Zaragoza (Spain)

Description

We report p-type conductivity in intrinsic indium oxide (IO) films deposited by magnetron sputtering on fused quartz substrates under oxygen-rich ambient. Highly oriented (111) films were studied by x-ray diffraction, optical absorption, and Hall effect measurements. We fabricated p-n homojunctions on these films.

Additional details

Identifiers

DOI
10.1063/1.3430035;

Publishing Information

Journal Title
Applied Physics Letters
Journal Volume
96
Journal Issue
19
Journal Page Range
p. 192108-192108.3
ISSN
0003-6951
CODEN
APPLAB

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
41078639
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ABSORPTION; CRYSTAL GROWTH; DEPOSITION; ELECTRIC CONDUCTIVITY; HALL EFFECT; INDIUM OXIDES; MAGNETRONS; OXYGEN; P-N JUNCTIONS; QUARTZ; SEMICONDUCTOR MATERIALS; SPUTTERING; THIN FILMS; ULTRAVIOLET SPECTRA; VISIBLE SPECTRA; X-RAY DIFFRACTION
Descriptors DEC
CHALCOGENIDES; COHERENT SCATTERING; DIFFRACTION; ELECTRICAL PROPERTIES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; INDIUM COMPOUNDS; MATERIALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; MINERALS; NONMETALS; OXIDE MINERALS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SCATTERING; SEMICONDUCTOR JUNCTIONS; SORPTION; SPECTRA

Optional Information

Notes
(c) 2010 American Institute of Physics