Setup for investigation of a neutral component of surface sputtering by ions

A method of negative ionization of a neutral sputtering component on an auxiliary target having low work function with following injection of negative ion flux formed under scattering on this surface into the mass spectrometer was suggested to investigate material surface sputtering at different temperatures by analyzing the neutral sputtering component. A high-vacuum cermet facility is developed and tested for practical realization of this method. The facility comprises an ion source of alkali metals with preliminary beam monokinetization in the field of 90 deg electrostatic condenser; sputtering and ionization chamber; system of additional target-ionizer of the neutral component, mass spectrometer of the sector type with the central angle of 60 deg intended for analysis of negative ions os elements of light masses (up to 200 a.u.m.) equipped with a unit for scanning the mass spectra as well as the system for signal amplification and detection