Published December 2017 | Version v1
Journal article Metadata-only

Properties of Molybdenum Films Produced by High-Power Impulse Magnetron Sputtering

Creators

  • 1. Institute of High-Current Electronics of the Siberian Branch of the Russian Academy of Sciences (Russian Federation)
  • 2. National Research Tomsk Polytechnic University (Russian Federation)

Description

Results of experiments on deposition of thin molybdenum films on glass substrates by high-power impulse magnetron sputtering are presented. Two high-current modes with different pulse frequencies and durations are used. Properties of the produced molybdenum films are compared with those of films produced by magnetron sputtering at a direct current. It is shown that this method allows the resistivity of molybdenum films to be decreased and their reflectance in the visible range to be increased.

Additional details

Identifiers

DOI
10.1007/s11182-017-1218-0;

Publishing Information

Journal Title
Russian Physics Journal
Journal Volume
60
Journal Issue
8
Journal Page Range
p. 1336-1340
ISSN
1064-8887
CODEN
RPJOEB

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
51025409
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
DEPOSITION; DIRECT CURRENT; ELECTRIC CONDUCTIVITY; EXPERIMENT RESULTS; GLASS; MAGNETRONS; MOLYBDENUM; REFLECTIVITY; SPUTTERING; SUBSTRATES; THIN FILMS
Descriptors DEC
CURRENTS; ELECTRIC CURRENTS; ELECTRICAL PROPERTIES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; METALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; OPTICAL PROPERTIES; PHYSICAL PROPERTIES; REFRACTORY METALS; SURFACE PROPERTIES; TRANSITION ELEMENTS

Optional Information

Copyright
Copyright (c) 2017 Springer Science+Business Media, LLC, part of Springer Nature
Notes
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