Development and evaluation of full field type EDXRF imaging instrument
- 1. Osaka City University, Graduate School of Engineering, Department of Applied Chemistry and Bioengineering, Osaka (Japan)
- 2. Kyoto Municipal Institute of Industrial Technology and Culture, Metallic Materials Lab., Kyoto (Japan)
- 3. Consiglio Nazionale delle Ricerche (CNR), Istituto per i Beni Archeologici e Monumentali, Catania (Italy)
Description
Energy dispersive X-ray fluorescence (EDXRF) is a nondestructive method for simultaneously analyzing multi elemental composition. To obtain a 2D elemental image, scanning type XRF imaging with a micro X-ray beam has been applied. In this case, the spatial resolution is very high. However, the drawback of this method is a long measurement time if a measurement area is large. In contrast, a full field type imaging technique is expected to obtain a large elemental image in a short time. Then, EDXRF imaging instrument with an X-ray CCD camera was evaluated as one of the tools to obtain information about elemental distribution of a specimen. This work describes the performance of the present EDXRF imaging instrument regarding such as spatial resolution and limit of detection. Finally, XRF images of practical samples were tried to be obtained. (author)
Abstract (Japanese)
エネルギー分散型蛍光X線分析(EDXRF)は試料中に含まれる複数の元素を同時に元素分析できる非破壊的な分析法である.元素分布像を取得するためには,一次X線としてのX線微細ビームに対して,測定箇所を逐次走査しながらエネルギー分析する方法が検討されてきた.この方法では照射ビーム径の大きさに相当する空間分解能の高い分析が可能であるが,測定する面積が大きい場合に,測定時間が長くなってしまうことが短所である.一方で,全視野型の元素イメージング法は短時間で広範囲の分析が行えると期待できる.そこで,X線CCDカメラを用いたEDXRFイメージング装置を組み立て,試料中の元素分布情報を取得するための分析法として評価した.本稿では,現在のEDXRFイメージング装置の空間分解能や検出限界について特性評価を行った.最後に,実試料の測定を行い,元素イメージの取得を試みた.(著者)Additional details
Additional titles
- Original title (Japanese)
- 全視野型EDXRFイメージング装置の開発と特性評価
Publishing Information
- Journal Title
- X-sen Bunseki No Shinpo
- Journal Volume
- 48
- Series
- 雑誌名:X線分析の進歩
- Journal Page Range
- p. 159-168
- ISSN
- 0911-7806
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 54097304
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Descriptors DEI
- CALIBRATION STANDARDS; CAPILLARIES; CHARGE-COUPLED DEVICES; CHEMICAL COMPOSITION; COLLIMATORS; MULTI-ELEMENT ANALYSIS; SENSITIVITY; SOFT X RADIATION; SPATIAL RESOLUTION; X-RAY FLUORESCENCE ANALYSIS; X-RAY TUBES
- Descriptors DEC
- BLOOD VESSELS; BODY; CARDIOVASCULAR SYSTEM; CHEMICAL ANALYSIS; ELECTROMAGNETIC RADIATION; ELECTRON TUBES; EQUIPMENT; IONIZING RADIATIONS; NONDESTRUCTIVE ANALYSIS; ORGANS; RADIATIONS; RESOLUTION; SEMICONDUCTOR DEVICES; STANDARDS; X RADIATION; X-RAY EMISSION ANALYSIS; X-RAY EQUIPMENT
Optional Information
- Notes
- 15 refs., 10 figs., 4 tabs.