Simulation of deep resonances in elastic backscattering data

Elastic backscattering is often used for improved sensitivity to light elements due to the enhanced cross sections, particularly at resonances. Depending on the beam energy, the resonance can take place near the surface, or deeper in the sample. Different effects influence the shape and size of the signal of buried resonances: the energy spread before interaction leads to a broadening of the signal, and also affects the yield; multiple scattering leads to a spread of the scattering angle and consequently also affects the yield. Furthermore, surface roughness will also increase the energy spread of the beam at a given depth. We treat all these effects quantitatively, including them in a standard simulation code. The agreement of simulations and data is excellent