Published March 2006 | Version v1
Journal article

Transparent conductive Cd3TeO6 thin films with perovskite structure

  • 1. Faculty of Science, Yokohama City University, 2-7-27 Chiyogaoka, Nara 631-0045 (Japan)
  • 2. Department of Applied Chemistry, Faculty of Engineering, Utsunomiya University, 7-1-2 Yoto, Utsunomiya 321-8585 (Japan)

Description

Transparent conductive Cd3TeO6 thin films were deposited by radio-frequency magnetron sputtering using a target composed of CdO and TeO2 powders, and these films' electrical and optical properties were examined. The electrical resistivity of 1.9x10-2 Ω cm and an average transmittance above 85% in the visible region (400-800 nm) were obtained after annealing the film at 500 deg. C. The film's carrier density and Hall mobility were 8.7x1019 cm-3 and 6.8 cm2 V-1 s-1, respectively. The absorption edge of the films was shifted to a lower wavelength by increasing the carrier density. The maximum band gap of these films was found to be 3.69 eV

Additional details

Identifiers

Publishing Information

Journal Title
Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
Journal Volume
24
Journal Issue
2
Journal Page Range
p. L4-L6
ISSN
1553-1813

Optional Information

Notes
(c) 2006 American Vacuum Society