Published March 2006
| Version v1
Journal article
Transparent conductive Cd3TeO6 thin films with perovskite structure
Creators
- 1. Faculty of Science, Yokohama City University, 2-7-27 Chiyogaoka, Nara 631-0045 (Japan)
- 2. Department of Applied Chemistry, Faculty of Engineering, Utsunomiya University, 7-1-2 Yoto, Utsunomiya 321-8585 (Japan)
Description
Transparent conductive Cd3TeO6 thin films were deposited by radio-frequency magnetron sputtering using a target composed of CdO and TeO2 powders, and these films' electrical and optical properties were examined. The electrical resistivity of 1.9x10-2 Ω cm and an average transmittance above 85% in the visible region (400-800 nm) were obtained after annealing the film at 500 deg. C. The film's carrier density and Hall mobility were 8.7x1019 cm-3 and 6.8 cm2 V-1 s-1, respectively. The absorption edge of the films was shifted to a lower wavelength by increasing the carrier density. The maximum band gap of these films was found to be 3.69 eV
Additional details
Identifiers
- DOI
- 10.1116/1.2172950;
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films
- Journal Volume
- 24
- Journal Issue
- 2
- Journal Page Range
- p. L4-L6
- ISSN
- 1553-1813
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37081255
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ABSORPTION; ANNEALING; CADMIUM OXIDES; CARRIER DENSITY; DEPOSITION; ELECTRIC CONDUCTIVITY; EV RANGE 01-10; MAGNETRONS; MOBILITY; OPTICAL PROPERTIES; PEROVSKITE; POWDERS; RADIOWAVE RADIATION; TELLURIUM OXIDES; THIN FILMS; VISIBLE SPECTRA
- Descriptors DEC
- CADMIUM COMPOUNDS; CHALCOGENIDES; ELECTRICAL PROPERTIES; ELECTROMAGNETIC RADIATION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ENERGY RANGE; EQUIPMENT; EV RANGE; FILMS; HEAT TREATMENTS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; MINERALS; OXIDE MINERALS; OXIDES; OXYGEN COMPOUNDS; PEROVSKITES; PHYSICAL PROPERTIES; RADIATIONS; SORPTION; SPECTRA; TELLURIUM COMPOUNDS
Optional Information
- Notes
- (c) 2006 American Vacuum Society