Published 2019
| Version v1
Book
Investigation of near-surface silicon layer irradiated by focused gallium ion beam
Creators
- 1. Yaroslavskij Filial Fiziko-Tekhnologicheskogo Inst. im. K.A. Valieva RAN, Yaroslavl' (Russian Federation)
Description
no abstract available
Additional details
Additional titles
- Original title (Russian)
- Исследование приповерхностного слоя кремния, облученного фокусированным ионным пучком галлия
Publishing Information
- Publisher
- KDU, Universitetskaya kniga
- Imprint Place
- Moscow (Russian Federation)
- ISBN
- 978-5-91304-894-3
- Imprint Title
- Summaries of reports of XLIX International Tulinov conference on physics of interactions of charged particles with crystals
- Imprint Pagination
- 218 p.
- Journal Page Range
- p. 161
Conference
- Title
- 49. International Tulinov conference on physics of interactions of charged particles with crystals
- Original Conference Title
- XLIX mezhdunarodnaya Tulinovskaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 29-31 May 2019
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 52087410
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference, Numerical Data
- Descriptors DEI
- EXPERIMENTAL DATA; GALLIUM IONS; INCIDENCE ANGLE; ION BEAMS; ION IMPLANTATION; ION MICROPROBE ANALYSIS; KEV RANGE 10-100; MASS SPECTROSCOPY; RADIATION DOSES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SPATIAL DISTRIBUTION
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; CHEMICAL ANALYSIS; DATA; DISTRIBUTION; DOSES; ELEMENTS; ENERGY RANGE; INFORMATION; IONS; KEV RANGE; MICROANALYSIS; NONDESTRUCTIVE ANALYSIS; NUMERICAL DATA; SEMIMETALS; SPECTROSCOPY
Optional Information
- Notes
- 1 ref. Imprint:Tezisy dokladov XLIX mezhdunarodnoj Tulinovskoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami