Published 2001 | Version v1
Miscellaneous Open

Structural characterization of semiconductor films growth by the technique of magnet planar cathodic erosion (sputtering)

Creators

  • 1. ESFM-IPN, Edificio 9, U.P.A.L.M., 07738 Mexico D.F. (Mexico)
  • 2. Facultad de Fisica, IMRE, Universidad de La Habana, 10400 La Habana (Cuba)

Description

no abstract available

Availability note (English)

Available from INIS in electronic form

Files

34068078.pdf

Files (25.0 kB)

Name Size Download all
md5:00a86826ef631c876970af5d30066736
25.0 kB Preview Download

Additional details

Additional titles

Original title (Spanish)
Caracterizacion estructural de peliculas semiconductoras crecidas por la tecnica de erosion catodica magneto-planar (sputtering)

Publishing Information

Imprint Pagination
1 p.
Report number
INIS-MX--1315

Conference

Title
44. National Physics Congress 2001
Dates
15-19 Oct 2001
Place
Morelia (Mexico)

INIS

Country of Publication
Mexico
Country of Input or Organization
Mexico
INIS RN
34068078
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
No Abstract, Conference
Descriptors DEI
ATOMIC FORCE MICROSCOPY; CADMIUM SELENIDES; CADMIUM TELLURIDES; CATHODE SPUTTERING; CRYSTAL GROWTH; CRYSTAL STRUCTURE; GRAIN SIZE; PRESSURE DEPENDENCE; RF SYSTEMS; STRUCTURAL CHEMICAL ANALYSIS; SUBSTRATES; THIN FILMS; TIME DEPENDENCE; X-RAY DIFFRACTION
Descriptors DEC
CADMIUM COMPOUNDS; CHALCOGENIDES; COHERENT SCATTERING; DIFFRACTION; FILMS; MICROSCOPY; MICROSTRUCTURE; SCATTERING; SELENIDES; SELENIUM COMPOUNDS; SIZE; SPUTTERING; TELLURIDES; TELLURIUM COMPOUNDS