Progress in x-ray microanalysis in the analytical electron microscope

Analytical electron microscopes (AEM) consisting of x-ray energy dispersive spectrometers (EDS) interfaced to scanning transmission electron microscopes have been available for more than a decade. During that time, progress towards reaching the fundamental limits of the technique has been slow. The progress of x-ray microanalysis in AEM is examined in terms of x-ray detector technology; the EDS/AEM interface; accuracy of microanalysis; and spatial resolution and detectability limits. X-ray microanalysis in the AEM has substantial room for improvement in terms of the interface between the detector and the microscope. Advances in microscope design and software should permit 10nm resolution with detectability limits approaching 0.01wt percent. 16 refs., 2 figs., 1 tab