Oscillation phenomena of a plasma produced by an AC driven hot cathode
- 1. Graduate School of Science and Engineering, Doshisha University, Kyotanabe, Kyoto 610-0321 (Japan)
Description
Amplitude of oscillating discharge current has been measured for Bernas-type ion source equipped with an alternating current heated hot tungsten filament cathode. Measurements have been made by changing the filament diameter from 0.2 mm to 0.7 mm, and by changing the DC discharge current from 0.1 A to 1.5 A. The fluctuation amplitude of the discharge current was found decreased as the diameter of the filament was enlarged. The fluctuation amplitude took the minimum value at a frequency from several hundred Hz to 1 kHz depending upon the filament diameter and DC discharge current. For example, the relative oscillation amplitude was the smallest at 1 kHz for 0.7 mm diameter filament. Increase in discharge current had reduced the minimum oscillation amplitude, and increased the frequency at which the oscillating amplitude took the minimum. Fundamental mechanisms relevant to these characteristics of oscillation amplitude of discharge current from an AC driven hot cathode filament are discussed.
Additional details
Identifiers
- DOI
- 10.1063/1.4766576;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 1496
- Journal Issue
- 1
- Journal Page Range
- p. 414-417
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 19. international conference on ion implantation technology
- Dates
- 25-29 Jun 2012
- Place
- Valladolid (Spain)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 44034813
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ALTERNATING CURRENT; AMPLITUDES; CATHODES; ELECTRIC DISCHARGES; FLUCTUATIONS; ION SOURCES; KHZ RANGE; OSCILLATIONS; PLASMA; PLASMA DIAGNOSTICS; PLASMA FILAMENT; PLASMA WAVES; TUNGSTEN
- Descriptors DEC
- CURRENTS; ELECTRIC CURRENTS; ELECTRODES; ELEMENTS; FREQUENCY RANGE; METALS; REFRACTORY METALS; TRANSITION ELEMENTS; VARIATIONS
Optional Information
- Notes
- (c) 2012 American Institute of Physics