Published November 6, 2012 | Version v1
Journal article

Oscillation phenomena of a plasma produced by an AC driven hot cathode

  • 1. Graduate School of Science and Engineering, Doshisha University, Kyotanabe, Kyoto 610-0321 (Japan)

Description

Amplitude of oscillating discharge current has been measured for Bernas-type ion source equipped with an alternating current heated hot tungsten filament cathode. Measurements have been made by changing the filament diameter from 0.2 mm to 0.7 mm, and by changing the DC discharge current from 0.1 A to 1.5 A. The fluctuation amplitude of the discharge current was found decreased as the diameter of the filament was enlarged. The fluctuation amplitude took the minimum value at a frequency from several hundred Hz to 1 kHz depending upon the filament diameter and DC discharge current. For example, the relative oscillation amplitude was the smallest at 1 kHz for 0.7 mm diameter filament. Increase in discharge current had reduced the minimum oscillation amplitude, and increased the frequency at which the oscillating amplitude took the minimum. Fundamental mechanisms relevant to these characteristics of oscillation amplitude of discharge current from an AC driven hot cathode filament are discussed.

Additional details

Identifiers

Publishing Information

Journal Title
AIP Conference Proceedings
Journal Volume
1496
Journal Issue
1
Journal Page Range
p. 414-417
ISSN
0094-243X
CODEN
APCPCS

Conference

Title
19. international conference on ion implantation technology
Dates
25-29 Jun 2012
Place
Valladolid (Spain)

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
44034813
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ALTERNATING CURRENT; AMPLITUDES; CATHODES; ELECTRIC DISCHARGES; FLUCTUATIONS; ION SOURCES; KHZ RANGE; OSCILLATIONS; PLASMA; PLASMA DIAGNOSTICS; PLASMA FILAMENT; PLASMA WAVES; TUNGSTEN
Descriptors DEC
CURRENTS; ELECTRIC CURRENTS; ELECTRODES; ELEMENTS; FREQUENCY RANGE; METALS; REFRACTORY METALS; TRANSITION ELEMENTS; VARIATIONS

Optional Information

Notes
(c) 2012 American Institute of Physics