Radiation-enhanced diffusion in helium-ion-irradiated germanium

N-type germanium (antimony donor atoms) was irradiated by 400-1200 keV helium ions at 2x1014-2x1016 cm-2 doses in the 100-870 K temperature range. It is found that germanium under irradiation converted down to great depths (approximately 30 μm). The p layer extent sharply grows at irradiation temperatures of > or approximately 870 K. The observed set of data permits to propose a model of process when interstitial germanium atoms diffuse out of their production area to great distances converting doped addition (antimony atoms) into inactive state