Published July 1, 2018 | Version v1
Journal article Metadata-only

Metallic coatings for MEMS structures

Creators

  • 1. Saint Petersburg State Electrotechnical University «LETI (Russian Federation)

Description

This paper presents the results of mechanical stresses measurement in thin metal films in the composition of MEMS structures. The main requirements for metal films for MEMS are presented, recommendations for choosing methods of film deposition are given. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1757-899X/387/1/012040

Additional details

Identifiers

DOI
10.1088/1757-899X/387/1/012040;

Publishing Information

Journal Title
IOP Conference Series. Materials Science and Engineering (Online)
Journal Volume
387
Journal Issue
1
Journal Page Range
[4 p.]
ISSN
1757-899X

Conference

Title
25. International Conference on Vacuum Technique and Technology
Dates
5-7 Jun 2018
Place
St. Petersburg (Russian Federation)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
52092288
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
COATINGS; DEPOSITION; MEMS; METALS; RECOMMENDATIONS; THIN FILMS
Descriptors DEC
ELEMENTS; FILMS