Published April 13, 2016
| Version v1
Journal article
Design and simulation of MEMS vector hydrophone with reduced cross section based meander beams
- 1. Solid State Physics Laboratory, DRDO, Lucknow Road, Timarpur, Delhi, India 110054 (India)
Description
MEMS based vector hydrophone is being one of the key device in the underwater communications. In this paper, we presented a bio-inspired MEMS vector hydrophone. The hydrophone structure consists of a proof mass suspended by four meander type beams with reduced cross-section. Modal patterns of the structure were studied. First three modal frequencies of the hydrophone structure were found to be 420 Hz, 420 Hz and 1646 Hz respectively. The deflection and stress of the hydrophone is found have linear behavior in the 1 µPa – 1Pa pressure range.
Additional details
Identifiers
- DOI
- 10.1063/1.4945176;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 1724
- Journal Issue
- 1
- Journal Page Range
- vp.
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 2. international conference on emerging technologies: Micro to nano 2015
- Acronym
- ETMN-2015
- Dates
- 24-25 Oct 2015
- Place
- Rajasthan (India)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 48035624
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- COMMUNICATIONS; DESIGN; HZ RANGE; KHZ RANGE; MASS; MEMS; PIEZOELECTRICITY; PIEZOMETRY; PRESSURE RANGE MICRO PA; PRESSURE RANGE MILLI PA; SIMULATION; STRESSES; TRANSDUCERS; UNDERWATER
- Descriptors DEC
- ELECTRICITY; FREQUENCY RANGE; LEVELS; PRESSURE MEASUREMENT; PRESSURE RANGE
Optional Information
- Notes
- (c) 2016 Author(s)