Published 1992
| Version v1
Miscellaneous
Measurement of implanted nitrogen layer-by-layer profiles by inelasticcally reflected electron spectroscopy
Description
Short communication. 1 fig
Additional details
Additional titles
- Original title (Russian)
- Измерение послойных профилей имплантированного азота на основе спектроскопии неупругоотраженных электронов
Publishing Information
- Imprint Title
- Summaries of reports of the 22. Conference on physics of charged particle interaction with crystals
- Imprint Pagination
- 135 p.
- Journal Page Range
- p. 133.
- Report number
- INIS-SU--340/A
Conference
- Title
- 22. Conference on physics of charged particle interaction with crystals.
- Original Conference Title
- 22. Soveshchanie po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 25-27 May 1992.
- Place
- Moscow (Russian Federation).
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 24037292
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- DEPTH; ELECTRON SPECTRA; ION IMPLANTATION; KEV RANGE 01-10; KEV RANGE 10-100; NIOBIUM; NITROGEN IONS; REFLECTION; SPATIAL DISTRIBUTION
- Descriptors DEC
- CHARGED PARTICLES; DIMENSIONS; DISTRIBUTION; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; METALS; SPECTRA; TRANSITION ELEMENTS
Optional Information
- Notes
- Imprint:ISBN 5-211-02900-3; published in Moscow State University.;Tezisy dokladov 22. Soveshchaniya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami.