Published 1992 | Version v1
Miscellaneous

Measurement of implanted nitrogen layer-by-layer profiles by inelasticcally reflected electron spectroscopy

Description

Short communication. 1 fig

Additional details

Additional titles

Original title (Russian)
Измерение послойных профилей имплантированного азота на основе спектроскопии неупругоотраженных электронов

Publishing Information

Imprint Title
Summaries of reports of the 22. Conference on physics of charged particle interaction with crystals
Imprint Pagination
135 p.
Journal Page Range
p. 133.
Report number
INIS-SU--340/A

Conference

Title
22. Conference on physics of charged particle interaction with crystals.
Original Conference Title
22. Soveshchanie po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
Dates
25-27 May 1992.
Place
Moscow (Russian Federation).

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
24037292
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
DEPTH; ELECTRON SPECTRA; ION IMPLANTATION; KEV RANGE 01-10; KEV RANGE 10-100; NIOBIUM; NITROGEN IONS; REFLECTION; SPATIAL DISTRIBUTION
Descriptors DEC
CHARGED PARTICLES; DIMENSIONS; DISTRIBUTION; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; METALS; SPECTRA; TRANSITION ELEMENTS

Optional Information

Notes
Imprint:ISBN 5-211-02900-3; published in Moscow State University.;Tezisy dokladov 22. Soveshchaniya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami.