Published September 2010 | Version v1
Journal article

XPS analysis technique and its preparation technique

  • 1. ULVAC-PHI, Inc., Chigasaki, Kanagawa (Japan)

Description

no abstract available

Additional details

Publishing Information

Journal Title
Kagaku Sochi
Journal Volume
52
Journal Issue
9
Journal Page Range
p. 64-68
ISSN
0368-4849

Optional Information

Notes
12 refs., 1 fig.