Published January 1985 | Version v1
Journal article Metadata-only

1 MV rotating-disc type high voltage generator for application to an implanter

Creators

  • 1. Kyushu Univ., Fukuoka (Japan). Dept. of Physics
  • 2. Ulvac Corp., Chigasaki, Kanagawa (Japan). R and D Div.

Description

A compact rotating-disc type high voltage generator with generated voltage of 1 MV and current of 2.8 mA has been developed for application to the high current and high voltage implanter. The design and characteristics of this high power generator will be described in detail in this report. (orig.)

Additional details

Publishing Information

Journal Title
Nucl. Instrum. Methods Phys. Res., Sect. B
Journal Volume
6
Journal Issue
1/2
Series
CODEN: NIMBE.;Nucl. Instrum. Methods Phys. Res., Sect. B.
Journal Page Range
250-257
ISSN
0168-583X

Conference

Title
5. international conference on ion implantation equipment and techniques.
Dates
23-27 Jul 1984.
Place
Jeffersonville, VT (USA).

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
16054354
Subject category
S07: ISOTOPES AND RADIATION SOURCES;
Resource subtype / Literary indicator
Conference, Numerical Data
Descriptors DEI
BEAM CURRENTS; EQUIPMENT; EXPERIMENTAL DATA; FREQUENCY DEPENDENCE; HIGH-VOLTAGE PULSE GENERATORS; ION IMPLANTATION; ION SOURCES; TIME DEPENDENCE
Descriptors DEC
CURRENTS; DATA; ELECTRONIC EQUIPMENT; FUNCTION GENERATORS; INFORMATION; NUMERICAL DATA; PULSE GENERATORS