Published 2000
| Version v1
Book
Deposition of CNx Films in Inductively Coupled RF Discharge
- 1. Department of Physical Electronics, Masaryk University, Brno (Czech Republic)
- 2. Department of Solid State Physics, Masaryk University, Brno (Czech Republic)
Description
no abstract available
Additional details
Publishing Information
- Publisher
- Printing Division, Space Research Center, Polish Academy of Sciences, Warsaw, Poland
- Imprint Place
- Warsaw (Poland)
- ISBN
- 83-902319-5-6
- Imprint Title
- 24 International Conference on Phenomena in Ionized Gases Proceedings - Vol. 1
- Imprint Pagination
- 260 p.
- Journal Page Range
- p. 41-42
Conference
- Title
- 24 International Conference on Phenomena in Ionized Gases
- Dates
- 11-16 Jul 1999
- Place
- Warsaw (Poland)
INIS
- Country of Publication
- Poland
- Country of Input or Organization
- Poland
- INIS RN
- 33059813
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- ABSORPTION; AMORPHOUS STATE; CARBON NITRIDES; CHARGE-COUPLED DEVICES; ELECTRIC HEATING; ELLIPSOMETRY; EMISSION SPECTRA; ENERGY GAP; FILMS; GAS FLOW; MICROHARDNESS; NITROGEN; PLASMA JETS; PRESSURE DEPENDENCE; REFRACTIVE INDEX; RF SYSTEMS; SILICON; SUBSTRATES; SURFACE COATING
- Descriptors DEC
- CARBON COMPOUNDS; DEPOSITION; ELEMENTS; FLUID FLOW; HARDNESS; HEATING; MEASURING METHODS; MECHANICAL PROPERTIES; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; OPTICAL PROPERTIES; PHYSICAL PROPERTIES; PNICTIDES; SEMICONDUCTOR DEVICES; SEMIMETALS; SORPTION; SPECTRA
Optional Information
- Contract/Grant/Project number
- Contract 106/96/K245; Contract VS96084
- Notes
- 9 refs, 2 figs
- Funding organization
- Grant Agency of the Czech Republic (Czech Republic); Ministry of Education (Czech Republic)