Published 1989 | Version v1
Miscellaneous

The use of electrostatic probes in R.F. plasmas for materials processing

  • 1. Oxford Univ. (UK). Dept. of Engineering Science

Description

Abstract only

Part of:
17th AINSE plasma physics conference: conference handbook

Additional details

Publishing Information

Publisher
AINSE.
Imprint Place
Lucas Heights (Australia)
Imprint Title
17th AINSE plasma physics conference: conference handbook
Imprint Pagination
90 p.
Journal Page Range
p. 77.
Report number
INIS-mf--11537

Conference

Title
17. AINSE plasma physics conference.
Dates
6-8 Feb 1989.
Place
Lucas Heights (Australia).

INIS

Country of Publication
Australia
Country of Input or Organization
Australia
INIS RN
20067038
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
BOOTSTRAP MODEL; DIRECT CURRENT; EXCITATION; LANGMUIR PROBE; PARTICLE LOSSES; PLASMA; RF SYSTEMS; SURFACE PROPERTIES
Descriptors DEC
COMPOSITE MODELS; CURRENTS; ELECTRIC CURRENTS; ELECTRIC PROBES; ENERGY-LEVEL TRANSITIONS; MATHEMATICAL MODELS; PARTICLE MODELS; PROBES

Optional Information