Published September 15, 2004
| Version v1
Journal article
Electrical properties of PZT thin films grown by sol-gel and PLD using a seed layer
- 1. Solid State Physics Laboratory, Lucknow Road, Timarpur, Delhi 110054 (India)
- 2. Department of Physics, Indian Institute of Technology, New Delhi 110016 (India)
- 3. Laser Science and Technology Centre, Metcalfe House, Delhi 110054 (India)
Description
Lead Zirconate Titanate (PZT) thin films (with molar ratio of Zr:Ti::65/35) were deposited by pulsed laser deposition (PLD) and sol-gel technique on Pt/Si (1 1 1), and Pt/Si (1 0 0) substrates. A seed layer of PbTiO3 (0.1 μm) was coated by sol-gel on the substrates before depositing PZT by PLD and sol-gel. A metal/ferroelectric/metal (MFM) capacitor structure, formed by depositing gold electrode on top of the film, was used for C-V and P-E measurements. A large remnant polarization (Pr = 56.8 μC/cm2) was observed on Pt/Si (1 1 1) substrates for the films deposited by sol-gel. Comparison of properties of PZT film deposited by these two techniques is discussed
Additional details
Identifiers
- DOI
- 10.1016/j.mseb.2004.06.011;
- PII
- S0921-5107(04)00272-7;
Publishing Information
- Journal Title
- Materials Science and Engineering. B, Solid-State Materials for Advanced Technology
- Journal Volume
- 112
- Journal Issue
- 1
- Journal Page Range
- p. 96-100
- ISSN
- 0921-5107
- CODEN
- MSBTEK
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36047427
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- CAPACITORS; CERAMICS; COMPARATIVE EVALUATIONS; ELECTRICAL PROPERTIES; ELECTRODES; ENERGY BEAM DEPOSITION; GOLD; INTERFACES; LASER RADIATION; LAYERS; PLATINUM; POLARIZATION; PULSED IRRADIATION; PZT; SILICON; SOL-GEL PROCESS; SUBSTRATES; THIN FILMS
- Descriptors DEC
- DEPOSITION; ELECTRICAL EQUIPMENT; ELECTROMAGNETIC RADIATION; ELEMENTS; EQUIPMENT; EVALUATION; FILMS; IRRADIATION; LEAD COMPOUNDS; METALS; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; PLATINUM METALS; RADIATIONS; SEMIMETALS; SURFACE COATING; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS; ZIRCONATES; ZIRCONIUM COMPOUNDS
Optional Information
- Copyright
- Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.